您的位置：
D212 D214壓力鈍感質(zhì)量流量計(jì)
簡(jiǎn)要描述：概要高穩(wěn)定性的質(zhì)量流量計(jì)－氣體流量控制不受上流和下流端壓力變化的影響
產(chǎn)品型號(hào)：- 廠商性質(zhì)：經(jīng)銷(xiāo)商
- 更新時(shí)間：2023-10-14
- 訪 問(wèn) 量：993
概要
高穩(wěn)定性的質(zhì)量流量計(jì)－氣體流量控制不受上流和下流端壓力變化的影響。不同壓力感測(cè)，采用壓力鈍感模式
特征
- 采用不同壓力感測(cè)即鈍感模式
- 縮小氣體柜的體積（不再需要壓力傳感器，調(diào)壓閥和過(guò)濾器）
- 流量控制量程范圍廠
- 精度高
- 提高產(chǎn)能－可以提供標(biāo)準(zhǔn)流量給半導(dǎo)體制程。
規(guī)格
|
| D212 | |||
|---|---|---|---|---|
| Maximum Full-Scale (N2) | 10 / 20 / 30 / 40sccm | 50sccm ~ 10slm | ||
| Operating Inlet Pressure | 14kPa (g) ~ 350kPa (g) | 250kPa(g) ~ 350kPa(g) | ||
| Maximum Outlet Pressure | ≤13.3kPa (a) | ≤53.3kPa (a) | ≤13.3kPa(a) | ≤53.3kPa(a) |
| Accuracy under Digital mode | ±1% S.P. | ±1% S.P. | ±1% S.P. | ±1% S.P. |
| Control Range under Digital mode (% F.S.) | 2.5% ~ 99% | 30 ~ 99% | 0.5 ~ 99% | 2 ~ 99% |
| Recommended Re-Zero Term | once/ year | |||
| Valve Type (PIEZO) | Normally Close | |||
| Linearity | ±0.5% F.S. | |||
| Repeatability | ±0.3% S.P. ( 10~99%) | |||
| Response Time | 800 msec. | |||
| Proof Pressure | 500kPa(g) | |||
| Burst Pressure | 1MPa(g) | |||
| Leak Integrity | <5×10-12 Pa·m3/s (He) | |||
| Wetted Materials | SUS-316L , INCONEL | |||
| Operating Temperature | 15 ~ 45°C | |||
| Flow Rate Setting Signal | 0 ~ 5VDC or RS485 F-NET Protocol | |||
| Flow Rate Output Signal | 0 ~ 5VDC or RS485 F-NET Protocol | |||
| Power Requirement | ± 15V ± 5%, 150 mA | |||
| Fittings | 1.125inch width 1/4VCR , C-seal , W-seal | |||
| Installation Orientation | Attitude Insensitive | |||
|
| D214 | ||||
|---|---|---|---|---|---|
| Maximum Full-Scale (N2) | 10 / 20 / 30 / 40sccm | 50sccm ~ 10slm | |||
| Operating Inlet Pressure | 14kPa (g) ~ 350kPa (g) | 250kPa(g) ~ 350kPa(g) | |||
| Maximum Outlet Pressure | ≤13.3kPa (a) | ≤53.3kPa (a) | ≤13.3kPa(a) | ≤53.3kPa(a) | |
| Accuracy under Digital mode | ±1% S.P. (35 ~ 99%) | ±1% S.P. ( 50 ~ 99%) | ±1% S.P. ( 5 ~ 99%) | ±1% S.P. ( 10 ~ 99%) | |
| Control Range under Digital mode | 2.5% ~ 99% F.S. | 30 ~ 99% F.S. | 0.5 ~ 99% F.S. | 2 ~ 99% F.S. | |
| Recommended Re-Zero Term | once/ year | ||||
| Valve Type (PIEZO) | Normally Close | ||||
| Linearity | ±0.5% F.S. | ||||
| Repeatability | ±0.3% S.P. ( 10~99%) | ||||
| Response Time | 800 msec. | ||||
| Proof Pressure | 500kPa(g) | ||||
| Burst Pressure | 1MPa(g) | ||||
| Leak Integrity | <5×10 -12 Pa·m 3 /s (He) | ||||
| Wetted Materials | SUS-316L , INCONEL | ||||
| Operating Temperature | 15 ~ 45°C | ||||
| Flow Rate Setting Signal | Device Net | ||||
| Flow Rate Output Signal | Device Net | ||||
| Power Requirement | 11~25VDC 4VA | ||||
| Fittings | 1.125inch width 1/4VCR , C-seal , W-seal | ||||
| Installation Orientation | Attitude Insensitive | ||||
| NOTE |
| ||||
| There are special variations for low inlet pressure condition. Please contact our local office if you have request / any questions about it. | |||||
在線交流
咨詢(xún)電話